BARATRON
Filed: July 20, 1981
Capacitance Manometers for Measuring for Vacuum Pressure
Owned by: MKS Instruments, Inc.
Serial Number: 73319899
MKS
Filed: January 12, 1984
Sensors and Electrical Instrumentation and Power Supplies and Signal Conditioners and Analog and Digital Meters for Measurement…
Owned by: MKS Instruments, Inc.
Serial Number: 73460587
M K S
Filed: January 12, 1984
Sensors and Electrical Instrumentation and Power Supplies and Signal Conditioners and Analog and Digital Meters for Measurement…
Owned by: MKS Instruments, Inc.
Serial Number: 73460592
ASTEX
Filed: March 28, 1988
MICROWAVE PLASMA GENERATOR UNITS AND COMPONENT PARTS THEREFOR FOR USE IN INDUSTRIAL AND SCIENTIFIC APPLICATIONS
Owned by: MKS Instruments, Inc.
Serial Number: 73718856
MASS-FLO
Filed: July 2, 1990
instruments for measuring and controlling the flow of gases and vapors
Owned by: MKS Instruments, Inc.
Serial Number: 74074899
CALSTAND
Filed: July 2, 1990
apparatus for calibrating pressure and flow transducers
Owned by: MKS Instruments, Inc.
Serial Number: 74075006
HPS
Filed: September 9, 1998
APPARATUS COMPONENTS FOR MATERIALS PROCESSING, NAMELY METAL FLANGES, METAL FITTINGS FOR GAS LINES
Owned by: MKS Instruments, Inc.
Serial Number: 75550234
VI PROBE
Filed: October 5, 1998
RADIO FREQUENCY PLASMA IMPEDANCE ANALYZERS AND RELATED CONTROL EQUIPMENT, NAMELY SENSOR HEADS, CABLES, TRANSFORMERS USED…
Owned by: MKS Instruments, Inc.
Serial Number: 75565156
SMARTPOWER
Filed: April 30, 1999
electrical power supplies, namely, microwave apparatus that matches load impedance and source impedance
Owned by: MKS Instruments, Inc.
Serial Number: 75694325
LIQUOZON
Filed: April 30, 1999
ozone generators
Owned by: MKS Instruments, Inc.
Serial Number: 75694345
MKS INSTRUMENTS
Filed: May 11, 1999
Sensors and electrical instrumentation and power supplies and signal conditioners and analog and digital meters for measurement…
Owned by: MKS Instruments, Inc.
Serial Number: 75706479
SPECTRUM
Filed: May 17, 2000
RADIO FREQUENCY PLASMA GENERATORS FOR USE IN THIN FILM PROCESSING
Owned by: MKS Instruments, Inc.
Serial Number: 76050428
PICO
Mass spectrometer-based leak detectors for use in detecting gases used in connection with semiconductor manufacturing, air…
Owned by: MKS Instruments, Inc.
Serial Number: 76117500
TRU-FLO
Filed: May 16, 2001
integrated diagnostic instrument composed of a chamber for providing a small gas volume, a pressure sensor, shut off values…
Owned by: MKS Instruments, Inc.
Serial Number: 76257907
MKS
Filed: May 21, 2001
Sensors and electrical instrumentation and power supplies and signal conditioners and analog and digital meters for measurement…
Owned by: MKS Instruments, Inc.
Serial Number: 76260293
MKS TECHNOLOGY FOR PRODUCTIVITY
Filed: June 13, 2001
Sensors and electrical instrumentation and power supplies and signal conditioners and analog and digital meters for measurement…
Owned by: MKS Instruments, Inc.
Serial Number: 76271135
I-BARATRON
Filed: October 31, 2001
CAPACITANCE MANOMETERS FOR MEASURING FOR VACUUM PRESSURE
Owned by: MKS Instruments, Inc.
Serial Number: 76331799
SEMOZON
Filed: October 10, 2002
Ozone Generator For Manufacture Of Ultra Pure, High Concentration Ozone Through Passing Oxygen Through A Silent Electrical…
Owned by: MKS Instruments, Inc.
Serial Number: 78173035
O3MEGA
Filed: February 7, 2005
Ozone gas generator and delivery systems comprised primarily of a pump, vaporizer, and power controller, used in the semiconductor…
Owned by: MKS Instruments, Inc.
Serial Number: 78562042
SUREPOWER
Filed: February 7, 2005
Radio Frequency (RF) Generators
Owned by: MKS Instruments, Inc.
Serial Number: 78562083
R*EVOLUTION
Filed: April 21, 2005
PLASMA GENERATORS FOR USE IN THE SEMICONDUCTOR [ AND BIOPHARMACEUTICAL ] INDUSTRIES
Owned by: MKS Instruments, Inc.
Serial Number: 78613986
AIRGARD
Filed: January 17, 2006
Gas analyzer for detecting chemical agents
Owned by: MKS Instruments, Inc.
Serial Number: 78793063
EO3
Ozone gas generators; ozone gas concentrators; ozone gas generators and delivery systems comprised primarily of a pump,…
Owned by: MKS Instruments, Inc.
Serial Number: 85778389
SURROUND THE WORKPIECE
Filed: June 13, 2018
Product design and development, laser and photonics system level integration, research and development, and consulting services…
Owned by: MKS Instruments, Inc.
Serial Number: 87960632
TRURAD
Filed: June 25, 2018
Plasma generator for etching, photoresist removal, strip, sputtering, deposition, chemical vapor deposition, ion implantation…
Owned by: MKS Instruments, Inc.
Serial Number: 88014240
SPARCLEAN
Plasma generator for etching, atomic later etch, sputtering, chemical vapor deposition, atomic layer deposition, ion implantation…
Owned by: MKS Instruments, Inc.
Serial Number: 88014243
MKS NEWPORT
Filed: July 25, 2019
measuring, testing and laboratory equipment in the fields of optics and photonics, namely, mirrors, lenses, beamsplitters…
Owned by: MKS Instruments, Inc.
Serial Number: 88536844
SURROUND THE CHAMBER
Filed: August 7, 2019
Maintenance, repair and calibration of products for use in semiconductor manufacturing processes
Owned by: MKS Instruments, Inc.
Serial Number: 88569347
CLEANLINE
Filed: June 29, 2020
Plasma generator for etching byproduct from vacuum piping, components, and systems
Owned by: MKS Instruments, Inc.
Serial Number: 90026379
ETRAC
Filed: January 21, 2021
Radio Frequency (RF) matching networks
Owned by: MKS Instruments, Inc.
Serial Number: 90479959
EDGE
Filed: January 21, 2021
Radio Frequency (RF) generators
Owned by: MKS Instruments, Inc.
Serial Number: 90479968
OPTIMIZE THE INTERCONNECT
Filed: May 23, 2022
Installation, set-up, maintenance and repair services of equipment used in the production of printed circuit boards and…
Owned by: MKS Instruments, Inc.
Serial Number: 97424180
MKS
Filed: June 17, 2022
Industrial programmable computer hardware; plasma generators for supplying activated gases; dissolved gas generation and…
Owned by: MKS Instruments, Inc.
Serial Number: 97463375
MKS
Filed: June 17, 2022
Semiconductor wafer processing equipment
Owned by: MKS Instruments, Inc.
Serial Number: 97463381
SURROUND THE WAFER
Filed: December 19, 2022
Maintenance and repair of products for use in semiconductor manufacturing processes
Owned by: MKS Instruments, Inc.
Serial Number: 97723378
