ELS
Filed: February 19, 1999
Lasers and wave meters, and components thereof, namely, light measuring instrumentation, not for medical use
Owned by: Cymer, LLC
Serial Number: 75645909
IGLX
computer hardware and computer software for use in the operation of non-medical lasers
Owned by: Cymer, LLC
Serial Number: 85262076
ONPULSE PLUS
Filed: September 28, 2011
computer hardware and software for data mining, data monitoring, and data analysis of performance parameters of light sources…
Owned by: Cymer, LLC
Serial Number: 85434105
DYNAPULSE
Filed: June 25, 2014
Laser-controlled optical assembly modules for use in enhancing the performance of photolithography sources
Owned by: Cymer, LLC
Serial Number: 86319872
DYNAPULSE
Filed: June 25, 2014
Computer software for use in enhancing the operational performance of laser-based photolithography sources
Owned by: Cymer, LLC
Serial Number: 86319882
SMARTLITHO
Software for use in data mining and analysis of the performance of photolithography tool clusters and their components,…
Owned by: Cymer, LLC
Serial Number: 87158424
