MERLIN
Filed: September 6, 2009
Photomask repair systems comprising computer hardware and software for the removal of opaque mask defects utilizing an atomic…
Owned by: BRUKER NANO INC.
Serial Number: 77821153
ENABLING TOMORROW'S TECHNOLOGY TODAY
Filed: August 11, 2005
Photomask repair systems comprising computer hardware and software for the removal of opaque mask defects utilizing an atomic…
Owned by: BRUKER NANO INC.
Serial Number: 78690967
NANOBIT
Filed: August 12, 2005
Miniature shaped diamond tips which are attached to a cantilever and used to mechanically remove defects from photomasks
Owned by: BRUKER NANO INC.
Serial Number: 78691662
RHAZER
Filed: May 24, 2010
photomask repair systems comprising hardware and software for the removal and mitigation of haze on photomasks
Owned by: BRUKER NANO INC.
Serial Number: 85046372
BITCLEAN
Filed: May 24, 2010
photomask repair systems comprising hardware and software for the removal of debris and defects on photomasks
Owned by: BRUKER NANO INC.
Serial Number: 85046379
NM-VI
Filed: July 7, 2017
Photomask repair systems comprising hardware and software for the removal and mitigation of haze on photomasks
Owned by: BRUKER NANO INC.
Serial Number: 87519226
FP-III
Filed: July 7, 2017
Photomask repair systems comprising hardware and software for the removal and mitigation of haze on photomasks
Owned by: BRUKER NANO INC.
Serial Number: 87519233
RHAZER III
Filed: July 7, 2017
Photomask repair systems comprising hardware and software for the removal and mitigation of haze on photomasks
Owned by: BRUKER NANO INC.
Serial Number: 87519237
