Micro-electro-mechanical devices, namely, sensors and electric actuators; acceleration sensors; angle speed sensors; pressure sensors; electronic circuits; integrated circuits; large scale integrated circuits; semiconductor drivers, namely, semiconductor drive circuits; integrated circuit chips, namely, electronic chips for the manufacture of integrated circuits; semiconductors; semiconductor elements, namely, chips, wafers and memories; semiconductor devices; semiconductor chips; semiconductor modules, namely, semiconductor chip sets, electronic semiconductors; integrated circuit boards; semiconductor sensors, namely, vibration sensors, optical sensors, electric sensors; optical sensors; optical sensors using semiconductors; clock generators for computers; oscillators; measuring and testing machines and instruments, namely, detectors and sensors for temperature, distance, magnetism, position, image, sonic wave, light, millimeter waves, acceleration, angle speed, and pressure; computers; integrated circuit modules; semiconductor substrates; microphones