Replacement machine parts for semiconductor wafer processing machines, namely, pneumatics rack backplane boards, digital pneumatics cards comprised of electronically controlled pneumatic valves, hybrid integrated circuit boards, power interface modules in the nature of computer interface boards, wafer slip computer interface boards, computer interface boards, regulators, pneumatic control boards for controlling pressure in chemical mechanical planarization machines, robotic sensors in the nature of electronic sensors for sensing wafer slippage in chemical mechanical planarization machines, cross motors, cross motor drives, platen motors, platen motor drives, head rotation motors, head rotation drives, robotic motors, robotic drives, head sweep assemblies in the nature of assemblies for controlling head motion in chemical mechanical planarization systems, pad conditioner rotation motors, pad conditioner rotation drives, pad conditioner sweep motors, pad conditioner sweep drives, platen gearboxes, pad conditioner rotation gearboxes, robotic gearboxes, pressure transducers, pad conditioner rotations x-bearings, platen rotation x-bearings, platens in the nature of printing plates, pneumatics electric control panels, robotic stepper motors, slip rings for the transmission of electrical signals, data processor boards, single board computers, and wafer loss sensors in the nature of electronic sensors for wafer slippage in chemical mechanical planarization machines; digital pneumatics cards comprised of electronically controlled pneumatic valves; regulators being parts of machines; cross motors, other than for land vehicles; cross motor drives; platen motors, other than for land vehicles; platen motor drives; head rotation motors, other than for land vehicles; head rotation motor drives; robotic motors, other than for land vehicles; robotic motor drives; pad conditioner rotation motors, other than for land vehicles; pad conditioner rotation motor drives; pad conditioner sweep motors, other than for land vehicles; pad conditioner sweep motor drives; platen gearboxes, other than for land vehicles; pad conditioner rotation gearboxes, other than for land vehicles; robotic gearboxes, other than for land vehicles; pad conditioner rotations x-bearings, as parts of machines; platen rotation x-bearings, as parts of machines; platens in the nature of printing plates; robotic stepper motors, other than for land vehicles

Pneumatics rack backplane boards; hybrid integrated circuit boards; power interface modules in the nature of computer interface boards; wafer slip computer interface boards; computer interface boards; electric pressure transducers; pneumatics electric control panels; slip rings for the transmission of electrical signals; data processor boards; single board computers; and wafer loss sensors in the nature of electronic sensors for wafer slippage in chemical mechanical planarization machines