Machines and structural parts therefor for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; fluid controllers being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; fluid measurement apparatus being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; fluid flow controllers being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; fluid flow meters being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; fluid flow sensors being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; fluid distributors being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; fluid flow distributors being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; fluid flow ratio controllers being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; fluid velocity controllers being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; fluid velocity measurement apparatus being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; pressure controllers being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; pressure meters being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; pressure sensors being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; concentration controllers being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; concentration meters being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; concentration monitors being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements; concentration sensors being structural parts of machines for manufacturing semiconductors, solar cells, light-emitting diodes, displays, liquid crystal and organic electroluminescent elements

Measuring or testing machines and instruments, namely, technical measuring, testing and checking apparatus and instruments for measuring, testing and checking the quantity of fluid flow, fluid pressure, fluid concentration, gas concentration of gas and liquids; fluid flow controllers for use in controlling a gas concentration; fluid measurement apparatuses, namely, gas concentration meters; fluid flow controllers namely, automatic liquid-flow control machines and instruments for use in controlling a gas concentration; fluid flow meters; fluid flow sensors, namely, electronic sensors for measuring fluid flow; fluid distributors, namely, flow regulators for selecting and distributing multiple types of fluid to multiple supply lines; fluid flow distributors, namely, flow regulators for selecting and distributing the flow rate of fluid for supplying to multiple supply lines; fluid flow ratio controllers, namely, flow regulators for controlling the flow ratio of fluid for supplying to multiple supply lines; fluid flow controllers for regulating the flow velocity of liquids and gases; fluid velocity measurement apparatus; pressure controllers for controlling the pressure of liquid, semi-liquid, and gaseous substances in industrial processes; pressure meters, namely, pressure meter indicators for use in controlling a gas concentration; pressure sensors; concentration controllers, namely, electronic controllers for regulating liquid or gas concentration; concentration meters; laboratory apparatuses and instruments for use in measuring fluid flow, fluid pressure, fluid concentrations, or gas concentrations