Machines for coating products, namely, machines for use in coating and surface treatment of parts for precision optics, displays, photovoltaic modules, energy-efficient glass, automotive and emerging industry application; equipment in the nature of plasma sources, evaporators, deposition chambers, vacuum pumps, substrate carriers, carrier transport mechanisms and controllers for physical vapor deposition, chemical vapor deposition, plasma vapor deposition, plasma enhanced deposition and atomic layer deposition for use on metals, semiconductors and dielectrics not for use in research; installations for processing metals, semiconductors and dielectrics in particular for processing these materials in a vacuum, namely, vacuum systems comprising deposition equipment, heating equipment, annealing equipment and structuring equipment for processing semiconductors not for use in research; machinery for transporting or processing or providing substrates for coating or surface treatment, namely, transportation systems comprised of motor drives, rollers, conveyor belts, and carriers, or ion sources, plasma sources, evaporators, sputter sources, electrical and optical process monitors, flash lamp annealing modules; machines and machine components, namely, chemical and physical processing equipment in the nature of Vacuum Physical Vapor Deposition (PVD) machines, Vacuum Plasma Activated Chemical Vapor Deposition (PACVD) machines, and ion and plasma treating equipment in the nature of Plasma Cleaning Systems comprised of a plasma source and cleaning chamber, Ion Beam Cleaning Systems comprised of an ion source and cleaning chamber all of the foregoing for treating metallic, semiconductive, and dielectric substrates in a vacuum and process gas atmosphere for manufacturing thin coatings and surface treated substrates; equipment for the vaporization of materials for the production of the aforesaid coatings, namely, equipment for evaporation, sputtering equipment, heating equipment for vaporizing various materials in the nature of metals, oxides, nitrides, semiconductors, and organic precursors all sold as a component of coating machines for use in coating solar cells and glass

Gas flow meters, electric voltage transformers, current converters for monitoring, controlling and regulating pressure, gas flow, voltage, current, power, plasma emission spectrum, temperature, and for measurement of substrate output, namely, film thickness, electric conductivity, optical transmission, optical reflectivity, and computing, monitoring and regulating equipment for controlling the aforementioned measurements during the coating process; vacuum coating apparatus for coating substrates, namely, a vacuum vessel, vacuum pumps, a glass substrate loading mechanism, a glass substrate carrier, a carrier transportation mechanism and controllers all of the foregoing as components of glass coating machines; laboratory apparatus for substrate storage and transport, namely, glass substrate carriers, glass substrate driers for laboratory purposes; substrates carrying an electrically conducting layer on one or two faces, namely, coated glass for architecture purposes and mirrors, all of the foregoing sold as a feature of photovoltaic modules; magnetron sputtering systems for machines for thin-film coating comprised of a vessel, cathodes, a substrate holder, means for transportation of the substrate through the vessel, namely, motors, motor drives, rotary motion vacuum feedthroughs, toothed belts, chains, wheels and controllers; parts and components for the manufacture and processing of materials and elements made from ultra-pure substances, in particular fabrication of parts for precision optics and semiconductor industry, namely, pumps, filters, purging circuits, transfer chambers, ultra-pure sputter targets, and ultra-pure gas sources all sold as a component of fabrication equipment for the production of energy

Engineering services in the field of thin film technology and surface treatment