Sensors, electrical instrumentation, gauges, switches and meters for measurement and control of fluid pressure, vacuum and gas flow; residual gas analyzers; monitors for detecting gas compositions within a process chamber; mass spectrometers; electrical analog-digital interface adapters; computer hardware used for measurement and control of fluid pressure, vacuum and gas flow; radio frequency, direct current and microwave power supplies and power generators for converting energy from chemical gas reactions; gas and fluid pressure valves, flanges and fittings for controlling, containing, isolating and shutting off gas and fluid flow; gas sticks composed of mass flow controllers, pressure transducers, control valves, isolation valves and volumes; helium leak detectors; gas detectors and analyzers; calibration equipment for monitoring and adjusting gas and fluid pressure and flow; traps for capturing waste materials exiting from a process chamber; software for operating mass spectrometers; computer hardware and software for determining the presence and measurement of residual contaminants; micro-processor based data communication devices for communicating between quadrupole gas or fluid mass analyzers and a computer; devices used to generate radio waves and microwave plasma; remote plasma sources; controllers, computer hardware and software for use in monitoring and controlling fluid, vacuum and gas generation, flow, detection, analysis, and delivery devices; radio frequency amplifiers and radio frequency power generators; and user manuals and guides sold as a unit therewith

Electronic gas filters and purifiers for gas conditioning; electric heaters for commercial use; reactive gas generators, namely, ozone generators; liquid delivery system composed primarily of a pump, vaporizer, and controller for vaporizing a liquid into a gas and delivering the gas to a process chamber