Machines for lithography, bonding, nanoimprint and metrology and machine tools for lithography, bonding, nanoimprint and metrology; machines for manufacturing electronic components and optical and technical devices; precision machines as well as spare parts for the same; self-regulating pumps.

Scientific apparatus and instruments for microelectronics, for medical equipment techniques, biotechnology, microsystem techniques, semiconductor and nanotechnology; surveying devices, electric, photographic, optical, measuring, signal, and monitoring devices, in particular for precision systems in the semiconductor technology, in microelectronics, in medical equipment techniques, biotechnology, microsystem techniques, and nanotechnology; chemical apparatus and instruments for analysis of lithography, bonding, nanoimprint and metrology systems; chips, integrated circuits; computer operation programs; peripheral equipment for computer; data processing units, data processing devices and computer; computer software; diagnosis devices in biochip format, namely oligonucleotide-arrays, miniaturized immunologic test-arrays, substance libraries, combinatorial sub-stance libraries on chip surfaces for scientific purposes; electric installations for the remote control of industrial operations; electric systems for lithography, bonding, nanoimprint and metrology; filters and masks for photographic and photolithographic purposes; devices for telecommunications; devices for telegraphy; telecopying devices; telephones; semiconductors; capillary tubes; monitoring devices (electric); coupler (data processing); special furniture for laboratories; laser (for non-medical purposes); reading devices (data processing); measuring instruments; measuring devices; material testing instruments and machines; diaphragms for scientific apparatus; optical apparatus and instruments; photographic apparatus and instruments; instruments for surveying physical data; physical analysing apparatus (other than for medical use); precision measuring devices; projectors; protective clothing, in particular for clean-rooms; silicon wafers; probes for scientific purposes; spectroscopes; finders (photographic).

Engineering services; development of precision systems and devices for the semiconductor technology; research relating to microsystem techniques; research relating to microelectronics; design and development of medical technology and biotechnology; telecommunications engineering; research relating to telecommunication techniques; providing systems technology solutions for sensorics and diagnostics, in particular of biology and medicine; research work in the field of bio-technology; research work in the field of microsystem technology and nanotechnology; research work in the field of bio-sensorics and chemical sensorics; technical consulting for third persons concerning handling production plants and process equipment; microsystem technology and nanotechnology services; providing temporary use of non-downloadable computer programs for data processing; designing of computer software.