Machines and machine tools, in particular vacuum treatment installations; vacuum coating facilities and vacuum etching installations; mechanical tools for all types of surface treatment, in particular tools for the physical and chemical cleaning, structuring, or removing of layers and mechanical processing of substrates to be coated in a vacuum installation; plasma and evaporation coating machines for the production of surface layers; coating sources of all kinds, in particular, evaporation sources, electron beam evaporators, ion beam sources, ion beam sputtering sources, PVD, CVD, PECVD sources, cathodic sputtering sources, and plasma spraying sources; vacuum coating installations for manufacturing semiconductors, integrated circuits, collectors; machines for the manufacture of surface coatings by plasma treatment or evaporation of coating materials on instruments of all kinds, in particular on lenses of glasses, contact lenses, mirrors, optical or electrical filters, architectural glass substrates for solar cells or solar cell modules, display substrates or modules, in particular computer screens, illumination layers, organic light-emitting diodes; accessories for vacuum treatment installations, namely, cathodic sputtering cathodes, plasma sources, cathodic sputtering shields, sputtering armor, sputtering masks, evaporation coating filaments for vacuum coating, evaporation coating shuttles, ceramic crucibles, quartz crystals, substrate carriers and gas introduction systems

Electronic devices and instruments for regulating, controlling, and monitoring; electronic devices and instruments for the controlling and treatment of surfaces; optical, electric, magnetic, spectroscopic sensors; measuring and control devices, namely, for measuring the growth of layers or the removal of coatings in thin-film processing installations; optical controllers and devices for measuring layer thickness of crystal oscillators, scientific instruments, namely, chip media cleaners for the surface cleaning of electronic components, plasma cleaning units for the pre-treatment of substrates which are to be coated in a vacuum installation or in support of coating processes; laboratory devices and instruments, namely, thin film technology accessories, in particular sputtering cathodes, plasma sources, sputtering targets, sputtering shields, sputtering masks, vacuum coating filaments, vacuum coating shuttles, ceramic crucibles, substrate carriers, and gas introduction systems; computer programs, in particular for regulating, controlling, and monitoring surfaces and surface treatments; vacuum measuring devices; sputtering cathodes; quartz crystals for measuring layer thickness