[ Scanning probe microscopes, scanning electronic microscopes and atomic force microscopes; ] electric and electronic and micro-mechanical and micro-electromechanical sensors and probes for non-optical microscopes and optical near field microscopes; [ electric and electronic and micro-mechanical and micro-electromechanical instruments and apparatus for detection of pressure, gases, temperature, intensity of light, forces, acceleration, vibrations, nick angle, humidity, distances, speed, roughness, thickness, acoustic waves, and molecules for measuring surface topography, height, electrical and magnetical surface properties,potentials and currents, and for applying electromagnetic irradiation, temperatures, mechanical, electrical and magnetical forces, currents and potentials to a substrate; ] electric and electronic and micro-mechanical and micro-electromechanical sensors and probes for atomic force microscopy, for scanning probe microscopy, and for scanning electronic microscopy; electric and electronic and micro-mechanical and micro-electromechanical sensors comprised of micro-mechanical cantilevers and membranes